MISC

2019年6月

Fabrication of Cavity-Sealed Optical Interferometric Surface Stress Biosensor by thin Film Transfer Technique

2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
  • Toshiaki Takahashi
  • ,
  • Yong Joon Choi
  • ,
  • Satoshi Maruyam
  • ,
  • Miki Taki
  • ,
  • Kazuaki Sawada
  • ,
  • Kazuhiro Takahashi

開始ページ
182
終了ページ
185
DOI
10.1109/TRANSDUCERS.2019.8808637

© 2019 IEEE. We developed a surface stress sensor based on a MEMS Fabry-Perot interferometer with cavity-sealed structure by transfer technique of nanometer-thick parylene sheet for highly sensitive label-free biosensing. The proposed MEMS interferometer can measure the membrane deflection caused by target molecule adsorption as the spectral shift. The proposed cavity-sealed optical interferometer can prevent physical adsorption to the backside of membrane and refractive index drift in the cavity, leading to improvement of sensitivity. We successfully obtained the spectral shift of 77 nm in 10 minutes with the color change associated with the antigen-antibody reaction with a concentration of 1 ng/ml, which improved by 16.7-fold compared with the conventional sensor.

リンク情報
DOI
https://doi.org/10.1109/TRANSDUCERS.2019.8808637
Scopus
https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85071936337&origin=inward
Scopus Citedby
https://www.scopus.com/inward/citedby.uri?partnerID=HzOxMe3b&scp=85071936337&origin=inward

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