論文

査読有り
2016年4月

Filter-less fluorescence sensor with high separation ability achieved by the suppression of forward-scattered light in silicon

Japanese Journal of Applied Physics
  • Yong Joon Choi
  • ,
  • Kazuhiro Takahashi
  • ,
  • Motoharu Matsuda
  • ,
  • Takeshi Hizawa
  • ,
  • Yu Moriwaki
  • ,
  • Fumihiro Dasai
  • ,
  • Yasuyuki Kimura
  • ,
  • Ippei Akita
  • ,
  • Tatsuya Iwata
  • ,
  • Makoto Ishida
  • ,
  • Kazuaki Sawada

55
4
記述言語
英語
掲載種別
研究論文(学術雑誌)
DOI
10.7567/JJAP.55.04EM10
出版者・発行元
IOP PUBLISHING LTD

© 2016 The Japan Society of Applied Physics. The improvement of a filter-less fluorescence sensor, by suppressing forward scattering in silicon by surface planarization is presented. A fluorescence microscope has been widely used in biochemical fields. However, it is difficult to miniaturize because optical filters and other parts are necessary. We previously developed a filter-less fluorescence sensor. The separation ability of excitation light and fluorescence in the previous device was 550:1. It is necessary to improve the separation ability. This study focuses on the suppression of forward-scattered incident light in silicon, through the enhanced surface planarization of polysilicon, which is the gate electrode material. The separation ability of the filter-less fluorescence sensor was increased from 550:1 to 1250:1 by the suppression of forward-scattered light.

Web of Science ® 被引用回数 : 5

リンク情報
DOI
https://doi.org/10.7567/JJAP.55.04EM10
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000373929400143&DestApp=WOS_CPL
Scopus
https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84963657196&origin=inward
Scopus Citedby
https://www.scopus.com/inward/citedby.uri?partnerID=HzOxMe3b&scp=84963657196&origin=inward

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