2021年
Microstructure, morphology and magnetic property of (001)-textured MnAlGe Films on Si/SiO<inf>2</inf> substrate
Materials Transactions
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- 巻
- 62
- 号
- 5
- 開始ページ
- 680
- 終了ページ
- 687
- 記述言語
- 掲載種別
- 研究論文(学術雑誌)
- DOI
- 10.2320/matertrans.MT-M2020309
Substrate heating effects on the microstructure and magnetic properties of MnAlGe films grown on Si/SiO2 substrate by sputtering system were investigated. The MnAlGe film fabricated by low-temperature substrate heating demonstrated amorphous phase and paramagnetic property. The film of c-axis orientation associated with the Cu2Sb-type structure was obtained by sputtering at a substrate heating temperature of 270°C and it exhibited perpendicular magnetic anisotropy. From the magnetization curves measured at room temperature, the uniaxial magnetic anisotropy energy, Ku, was evaluated to be in the order of 106 erg/cm3, which is consistent with the literature, although the heating processing and temperature are slightly different. Microstructural observation indicated that the c-axis oriented grains were isolated in the matrix of the amorphous phase. The film lost the c-axis orientation at elevated substrate heating temperature, resulting in loss of the anisotropic magnetic property.
- リンク情報
- ID情報
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- DOI : 10.2320/matertrans.MT-M2020309
- ISSN : 1345-9678
- SCOPUS ID : 85105252730