論文

査読有り
2015年7月

広視野レーザ顕微鏡による円筒面全面のナノスケール計測

精密工学会誌
  • 月山陽介
  • ,
  • 福島直幸
  • ,
  • 新田勇

81
7
開始ページ
699
終了ページ
704
記述言語
日本語
掲載種別
研究論文(学術雑誌)
DOI
10.2493/jjspe.81.699
出版者・発行元
公益社団法人 精密工学会

In a previous study, we developed a new method for observation of the whole cylindrical surface in a very short time,using a laser microscope with a wide field of view. When cylindrical specimens were rotated by a motor-driven rotary table, the focused laser light was scanned along a generatrix of the cylinder surface. Thus, the whole cylinder surface could be observed easily even over a very short time. As the obtained image was a developed view of the cylinder surface, it was easy to measure the distance between any two points on the cylindrical surface. In this study, we acquired interference images of the whole cylinder surface with the aid of a reference plane. As a result, fringe patterns over the whole cylinder surface could be obtained. From image processing of the fringe patterns, we calculated the nanoscale surface profile of the cylinder.

リンク情報
DOI
https://doi.org/10.2493/jjspe.81.699
CiNii Articles
http://ci.nii.ac.jp/naid/130005084687
URL
https://jlc.jst.go.jp/DN/JLC/20012757693?from=CiNii
ID情報
  • DOI : 10.2493/jjspe.81.699
  • ISSN : 1882-675X
  • CiNii Articles ID : 130005084687

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