2015年7月
広視野レーザ顕微鏡による円筒面全面のナノスケール計測
精密工学会誌
- ,
- ,
- 巻
- 81
- 号
- 7
- 開始ページ
- 699
- 終了ページ
- 704
- 記述言語
- 日本語
- 掲載種別
- 研究論文(学術雑誌)
- DOI
- 10.2493/jjspe.81.699
- 出版者・発行元
- 公益社団法人 精密工学会
In a previous study, we developed a new method for observation of the whole cylindrical surface in a very short time,using a laser microscope with a wide field of view. When cylindrical specimens were rotated by a motor-driven rotary table, the focused laser light was scanned along a generatrix of the cylinder surface. Thus, the whole cylinder surface could be observed easily even over a very short time. As the obtained image was a developed view of the cylinder surface, it was easy to measure the distance between any two points on the cylindrical surface. In this study, we acquired interference images of the whole cylinder surface with the aid of a reference plane. As a result, fringe patterns over the whole cylinder surface could be obtained. From image processing of the fringe patterns, we calculated the nanoscale surface profile of the cylinder.
- リンク情報
- ID情報
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- DOI : 10.2493/jjspe.81.699
- ISSN : 1882-675X
- CiNii Articles ID : 130005084687