2012年4月
Recovery Characteristics of Anomalous Stress-Induced Leakage Current of 5.6nm Oxide Films
JAPANESE JOURNAL OF APPLIED PHYSICS
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- 巻
- 51
- 号
- 4
- 記述言語
- 英語
- 掲載種別
- 研究論文(学術雑誌)
- DOI
- 10.1143/JJAP.51.04DC02
- 出版者・発行元
- JAPAN SOC APPLIED PHYSICS
Anomalous stress-induced leakage current (SILC), which has a much larger current density than average SILC, causes severe bit error in flash memories. To suppress anomalous SILC, detailed evaluations are strongly required. We evaluate the characteristics of anomalous SILC of 5.6nm oxide films using a fabricated array test pattern, and recovery characteristics are observed. Some characteristics of typical anomalous cells in the time domain are measured, and the recovery characteristics of average and anomalous SILCs are examined. Some of the anomalous cells have random telegraph signals (RTSs) of gate leakage current, which are characterized as discrete and random switching phenomena. The dependence of RTSs on the applied electric field is investigated, and the recovery tendency of anomalous SILC with and without RTSs are also discussed. (C) 2012 The Japan Society of Applied Physics
- リンク情報
- ID情報
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- DOI : 10.1143/JJAP.51.04DC02
- ISSN : 0021-4922
- eISSN : 1347-4065
- Web of Science ID : WOS:000303928600017