論文

査読有り
1993年3月

FABRICATION OF SUBMICRON APERTURES IN THIN MEMBRANES OF SILICON-NITRIDE

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
  • A AMAR
  • ,
  • RL LOZES
  • ,
  • Y SASAKI
  • ,
  • JC DAVIS
  • ,
  • RE PACKARD

11
2
開始ページ
259
終了ページ
262
記述言語
英語
掲載種別
研究論文(学術雑誌)
DOI
10.1116/1.586667
出版者・発行元
A V S AMER INST PHYSICS

A technique for manufacturing submicron apertures used for investigating hydrodynamic quantum phenomena in the superfluids He-4 and He-3 is described. The apertures are fabricated in approximately 100 nm thick suspended membranes of silicon nitride by using e-beam lithography and reactive ion etching.

リンク情報
DOI
https://doi.org/10.1116/1.586667
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:A1993KY05000022&DestApp=WOS_CPL
ID情報
  • DOI : 10.1116/1.586667
  • ISSN : 1071-1023
  • Web of Science ID : WOS:A1993KY05000022

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