2013年
Nanoindentation Hardness and Elastic Modulus of AlGaN Alloys
2013 CONFERENCE ON LASERS AND ELECTRO-OPTICS PACIFIC RIM (CLEO-PR)
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- 開始ページ
- TuPH-3
- 終了ページ
- 記述言語
- 英語
- 掲載種別
- 出版者・発行元
- IEEE
Nanoindentation hardness tests were conducted on various AlxGa1-xN alloys grown by metal-organic vapor-phase epitaxy. AlGaN alloys showed the hardness of 16.5-19.5 GPa strongly dependent on the alloy composition with a maximum at x similar to 0.5, while the Young's modulus was similar to 300GPa, almost constant in the whole composition range investigated. The observed alloy hardening was confirmed under considering the effects of residual in-plane strain and threading dislocation densities.
- リンク情報
- ID情報
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- Web of Science ID : WOS:000334176100468