MISC

2013年

Nanoindentation Hardness and Elastic Modulus of AlGaN Alloys

2013 CONFERENCE ON LASERS AND ELECTRO-OPTICS PACIFIC RIM (CLEO-PR)
  • Y. Tokumoto
  • ,
  • H. Taneichi
  • ,
  • Y. Ohno
  • ,
  • K. Kutsukake
  • ,
  • H. Miyake
  • ,
  • K. Hiramatsu
  • ,
  • I. Yonenaga

開始ページ
TuPH-3
終了ページ
記述言語
英語
掲載種別
出版者・発行元
IEEE

Nanoindentation hardness tests were conducted on various AlxGa1-xN alloys grown by metal-organic vapor-phase epitaxy. AlGaN alloys showed the hardness of 16.5-19.5 GPa strongly dependent on the alloy composition with a maximum at x similar to 0.5, while the Young's modulus was similar to 300GPa, almost constant in the whole composition range investigated. The observed alloy hardening was confirmed under considering the effects of residual in-plane strain and threading dislocation densities.

リンク情報
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000334176100468&DestApp=WOS_CPL
ID情報
  • Web of Science ID : WOS:000334176100468

エクスポート
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