2020年8月31日
Ultrafast laser ablation of 10-nm self-supporting membranes by two-beam interference processing
Optics Express
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- ,
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- 巻
- 28
- 号
- 18
- 開始ページ
- 26200
- 終了ページ
- 26206
- 記述言語
- 掲載種別
- 研究論文(学術雑誌)
- DOI
- 10.1364/oe.400941
- 出版者・発行元
- The Optical Society
Ultrafast laser ablation was applied to process 10-nm self-supporting membranes. The membranes were processed over tens of square micrometers by single-shot irradiation of two visible laser pulses, followed by the realization of periodic sub-microstructures. The fabricated geometry is dependent on the intensity distribution of the superposed input pulses, providing flexibility and facilitating practical micro- and nanoengineering. Ease of designing the processing parameters and speed of processing are the significant advantages of this method compared to focused ion beam (FIB) milling.
- リンク情報
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- DOI
- https://doi.org/10.1364/oe.400941
- PubMed
- https://www.ncbi.nlm.nih.gov/pubmed/32906896
- URL
- https://www.osapublishing.org/viewmedia.cfm?URI=oe-28-18-26200&seq=0
- Scopus
- https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85090391636&origin=inward 本文へのリンクあり
- Scopus Citedby
- https://www.scopus.com/inward/citedby.uri?partnerID=HzOxMe3b&scp=85090391636&origin=inward
- ID情報
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- DOI : 10.1364/oe.400941
- eISSN : 1094-4087
- PubMed ID : 32906896
- SCOPUS ID : 85090391636