論文

査読有り 筆頭著者 本文へのリンクあり
2020年8月31日

Ultrafast laser ablation of 10-nm self-supporting membranes by two-beam interference processing

Optics Express
  • Yuuki Uesugi
  • ,
  • Ryota Fukushima
  • ,
  • Yuichi Kozawa
  • ,
  • Shunichi Sato

28
18
開始ページ
26200
終了ページ
26206
記述言語
掲載種別
研究論文(学術雑誌)
DOI
10.1364/oe.400941
出版者・発行元
The Optical Society

Ultrafast laser ablation was applied to process 10-nm self-supporting membranes. The membranes were processed over tens of square micrometers by single-shot irradiation of two visible laser pulses, followed by the realization of periodic sub-microstructures. The fabricated geometry is dependent on the intensity distribution of the superposed input pulses, providing flexibility and facilitating practical micro- and nanoengineering. Ease of designing the processing parameters and speed of processing are the significant advantages of this method compared to focused ion beam (FIB) milling.

リンク情報
DOI
https://doi.org/10.1364/oe.400941
PubMed
https://www.ncbi.nlm.nih.gov/pubmed/32906896
URL
https://www.osapublishing.org/viewmedia.cfm?URI=oe-28-18-26200&seq=0
Scopus
https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85090391636&origin=inward 本文へのリンクあり
Scopus Citedby
https://www.scopus.com/inward/citedby.uri?partnerID=HzOxMe3b&scp=85090391636&origin=inward
ID情報
  • DOI : 10.1364/oe.400941
  • eISSN : 1094-4087
  • PubMed ID : 32906896
  • SCOPUS ID : 85090391636

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