2021年11月11日
The plasma diagnosis of 133 Pa argon microwave discharge plasma by optical emission spectroscopic measurement based on systematic excitation-kinetics analysis
Proceedings of 42nd International Symposium on Dry Process
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- 開始ページ
- 57
- 終了ページ
- 58
- 記述言語
- 日本語
- 掲載種別
- 研究発表ペーパー・要旨（国際会議）
- 出版者・発行元
- 42nd International Symposium on Dry Process Organizing Committee
Electron temperature, density, and electron density distribution function of 133 Pa argon microwave discharge plasma were diagnosed by optical emission spectroscopic measurement. As a result of systematic analysis of the reduced population density distribution based on argon collisionalradiative model, we found emission lines that can be reasonably diagnosed. The diagnostics results were compared with line-pair method, excitation-temperature conversion method, and probe measurement.