MISC

査読有り
2011年

SACRIFICIAL MICROCHANNEL SEALING BY GLASS-FRIT REFLOW FOR CHIP SCALE ATOMIC MAGNETOMETER

2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)
  • K. Tsujimoto
  • ,
  • Y. Hirai
  • ,
  • K. Sugano
  • ,
  • T. Tsuchiya
  • ,
  • O. Tabata

開始ページ
368
終了ページ
371
記述言語
英語
掲載種別
DOI
10.1109/MEMSYS.2011.5734438
出版者・発行元
IEEE

This paper reports on a novel and simple packaging technique to enhance the atmosphere controllability of the microfabricated alkali vapor cell used for CSAMs (Chip Scale Atomic Magnetometers), in which sacrificial microchannels at the bonded interface are utilized as gas feedthrough for evacuation and filling, subsequently sealed by glass-frit reflow. By applying the proposed method, a 10 mm(3) potassium vapor cell with 0.1 MPa helium buffer gas was fabricated. Sealing of the microchannels by glass-frit reflow were successfully demonstrated adopting the optimized parameters as 460-480 degrees C at bonding pressure of more than 250 kPa. The leak rate of less than 3.1x10(-14) Pa.m(3)/s, which is required sealing quality for CSAM, was verified through a high resolution helium leak test.

リンク情報
DOI
https://doi.org/10.1109/MEMSYS.2011.5734438
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000295841200091&DestApp=WOS_CPL
URL
https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=79953780290&origin=inward
ID情報
  • DOI : 10.1109/MEMSYS.2011.5734438
  • ISSN : 1084-6999
  • SCOPUS ID : 79953780290
  • Web of Science ID : WOS:000295841200091

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