2013年11月
On-chip fabrication of alkali-metal vapor cells utilizing an alkali-metal source tablet
Journal of Micromechanics and Microengineering
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- 巻
- 23
- 号
- 11
- 開始ページ
- 115003
- 終了ページ
- 記述言語
- 英語
- 掲載種別
- 研究論文(学術雑誌)
- DOI
- 10.1088/0960-1317/23/11/115003
- 出版者・発行元
- IOP PUBLISHING LTD
We describe a novel on-chip microfabrication technique for the alkali-metal vapor cell of an optically pumped atomic magnetometer (OPAM), utilizing an alkali-metal source tablet (AMST). The newly proposed AMST is a millimeter-sized piece of porous alumina whose considerable surface area holds deposited alkali-metal chloride (KCl) and barium azide (BaN6), source materials that effectively produce alkali-metal vapor at less than 400 °C. Our experiments indicated that the most effective pore size of the AMST is between 60 and 170 μm. The thickness of an insulating glass spacer holding the AMST was designed to confine generated alkali metal to the interior of the vapor cell during its production, and an integrated silicon heater was designed to seal the device using a glass frit, melted at an optimum temperature range of 460-490 °C that was determined by finite element method thermal simulation. The proposed design and AMST were used to successfully fabricate a K cell that was then operated as an OPAM with a measured sensitivity of 50 pT. These results demonstrate that the proposed concept for on-chip microfabrication of alkali-metal vapor cells may lead to effective replacement of conventional glassworking approaches. © 2013 IOP Publishing Ltd.
- ID情報
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- DOI : 10.1088/0960-1317/23/11/115003
- ISSN : 0960-1317
- ISSN : 1361-6439
- SCOPUS ID : 84887125332