論文

査読有り
2013年11月

On-chip fabrication of alkali-metal vapor cells utilizing an alkali-metal source tablet

Journal of Micromechanics and Microengineering
  • K. Tsujimoto
  • ,
  • K. Ban
  • ,
  • Y. Hirai
  • ,
  • K. Sugano
  • ,
  • T. Tsuchiya
  • ,
  • N. Mizutani
  • ,
  • O. Tabata

23
11
開始ページ
115003
終了ページ
記述言語
英語
掲載種別
研究論文(学術雑誌)
DOI
10.1088/0960-1317/23/11/115003
出版者・発行元
IOP PUBLISHING LTD

We describe a novel on-chip microfabrication technique for the alkali-metal vapor cell of an optically pumped atomic magnetometer (OPAM), utilizing an alkali-metal source tablet (AMST). The newly proposed AMST is a millimeter-sized piece of porous alumina whose considerable surface area holds deposited alkali-metal chloride (KCl) and barium azide (BaN6), source materials that effectively produce alkali-metal vapor at less than 400 °C. Our experiments indicated that the most effective pore size of the AMST is between 60 and 170 μm. The thickness of an insulating glass spacer holding the AMST was designed to confine generated alkali metal to the interior of the vapor cell during its production, and an integrated silicon heater was designed to seal the device using a glass frit, melted at an optimum temperature range of 460-490 °C that was determined by finite element method thermal simulation. The proposed design and AMST were used to successfully fabricate a K cell that was then operated as an OPAM with a measured sensitivity of 50 pT. These results demonstrate that the proposed concept for on-chip microfabrication of alkali-metal vapor cells may lead to effective replacement of conventional glassworking approaches. © 2013 IOP Publishing Ltd.

リンク情報
DOI
https://doi.org/10.1088/0960-1317/23/11/115003
ID情報
  • DOI : 10.1088/0960-1317/23/11/115003
  • ISSN : 0960-1317
  • ISSN : 1361-6439
  • SCOPUS ID : 84887125332

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