MISC

2006年

Fabrication of spiral micro-coil utilizing LIGA process

Jsme International Journal Series a-Solid Mechanics and Material Engineering
  • Shimada, O
  • ,
  • Kusumi, S
  • ,
  • Mekaru, H
  • ,
  • Sato, N
  • ,
  • Shimizu, M
  • ,
  • Yamashita, M
  • ,
  • Hattori, T

49
1
開始ページ
74
終了ページ
78
記述言語
英語
掲載種別
DOI
10.1299/jsmea.49.74
出版者・発行元
JAPAN SOC MECHANICAL ENGINEERS

We developed a method for fabricating a three-dimensional spiral micro-inductor with high inductance using the LIGA process. The spiral inductor created had a diameter of 0.5 mm, and a length of I turn. The width of the spiral line was 10 mu m, the pitch was 20 mu m, and the number of turns was 15. It was made of plated copper. The master was a brass round bar coated with PMMA resist. Deep X-ray lithography was employed to fabricate a master for a metallic mold at the NewSUBARU synchrotron radiation facility, University of Hyogo. The inductor core was made of resin by injection molding. It has a spiral micro flute on the surface. We chose the worm injection molding technique in order to avoid the parting line across the spiral line. The worm injection molding was the method-for demolding the work such as that used in loosening a screw.

リンク情報
DOI
https://doi.org/10.1299/jsmea.49.74
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000235738400014&DestApp=WOS_CPL
ID情報
  • DOI : 10.1299/jsmea.49.74
  • ISSN : 1344-7912
  • ORCIDのPut Code : 44484088
  • Web of Science ID : WOS:000235738400014

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