2001年4月
Integrated sculptured thin films
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS
- ,
- 巻
- 40
- 号
- 4A
- 開始ページ
- L358
- 終了ページ
- L359
- 記述言語
- 英語
- 掲載種別
- 研究論文(学術雑誌)
- DOI
- 10.1143/JJAP.40.L358
- 出版者・発行元
- INST PURE APPLIED PHYSICS
We have demonstrated the integration of various morphologies generated by dynamic oblique deposition, during which the deposition angle and the azimuth of the substrate are varied. The layers with zigzag, helicoidal and cylindrical columns have been successfully stacked on a substrate without using any etching process. In addition, the uniform and flat layer is formed on porous layers by a gradual change in the deposition geometry. Therefore, shape-related physical anisotropies and the chemical activity due to high porosity can be integrated in one thin film, making it applicable to devices such as solar cells and chemical sensors.
- リンク情報
- ID情報
-
- DOI : 10.1143/JJAP.40.L358
- ISSN : 0021-4922
- Web of Science ID : WOS:000170777200018