論文

査読有り
2001年4月

Integrated sculptured thin films

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS
  • M Suzuki
  • ,
  • Y Taga

40
4A
開始ページ
L358
終了ページ
L359
記述言語
英語
掲載種別
研究論文(学術雑誌)
DOI
10.1143/JJAP.40.L358
出版者・発行元
INST PURE APPLIED PHYSICS

We have demonstrated the integration of various morphologies generated by dynamic oblique deposition, during which the deposition angle and the azimuth of the substrate are varied. The layers with zigzag, helicoidal and cylindrical columns have been successfully stacked on a substrate without using any etching process. In addition, the uniform and flat layer is formed on porous layers by a gradual change in the deposition geometry. Therefore, shape-related physical anisotropies and the chemical activity due to high porosity can be integrated in one thin film, making it applicable to devices such as solar cells and chemical sensors.

リンク情報
DOI
https://doi.org/10.1143/JJAP.40.L358
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000170777200018&DestApp=WOS_CPL
ID情報
  • DOI : 10.1143/JJAP.40.L358
  • ISSN : 0021-4922
  • Web of Science ID : WOS:000170777200018

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