2020年7月
Evaluation of p-type 4H-SiC piezoresistance coefficients in (0001) plane using numerical simulation
Materials Science Forum
- ,
- ,
- 巻
- 1004 MSF
- 号
- 開始ページ
- 249
- 終了ページ
- 255
- 記述言語
- 掲載種別
- 研究論文(学術雑誌)
- DOI
- 10.4028/www.scientific.net/MSF.1004.249
- 出版者・発行元
- Materials Science Forum
A numerical simulation of p-type 4H-Silicon Carbide (4H-SiC) piezoresistance coefficients in (0001) plane evaluation is shown in this study. A 4H-SiC material has outstanding material characteristics of wide band-gap of 3.26 eV and high temperature robustness. However, many material properties of 4H-SiC material are still unknown, including piezoresistance coefficients. Piezoresistive effect is resistivity change when mechanical stress is applied to the material. Piezoresistance coefficients express the magnitude of this effect, important for designing a mechanical stress sensor. In this study, reported piezoresistance coefficients of p-type 4H-SiC in (0001) plane is evaluated based on numerical simulation. The simulated results of Gauge Factor (<italic>GF</italic>) values (determined by (<italic>ΔR</italic>/<italic>R</italic>)/<italic>ε</italic> (<italic>R</italic> is the resistance and <italic>ε</italic> is the strain of material)) well matched to the theoretical <italic>GF</italic> values (determined by <italic>πE</italic> (<italic>π</italic> is the piezoresistance coefficient and <italic>E</italic> is Young’s modulus of the material)), shows that reported piezoresistance coefficients are reliable. Also, the internal mappings of piezoresistive effect from the numerical simulation are shown, useful to understand piezoresistive effect which is difficult to see by experimental results.
- リンク情報
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- DOI
- https://doi.org/10.4028/www.scientific.net/MSF.1004.249
- URL
- https://www.scientific.net/MSF.1004.249.pdf
- Scopus
- https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85089819254&origin=inward
- Scopus Citedby
- https://www.scopus.com/inward/citedby.uri?partnerID=HzOxMe3b&scp=85089819254&origin=inward
- ID情報
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- DOI : 10.4028/www.scientific.net/MSF.1004.249
- ISSN : 0255-5476
- eISSN : 1662-9752
- ORCIDのPut Code : 79782472
- SCOPUS ID : 85089819254