2014年
TWO AXIAL SHEARING FORCE MEASUREMENT DEVICE WITH A MICRO DISPLACEMENT SENSOR
2014 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN)
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- 開始ページ
- 213
- 終了ページ
- 214
- 記述言語
- 英語
- 掲載種別
- 研究論文(国際会議プロシーディングス)
- 出版者・発行元
- IEEE
We propose a promising biaxial shearing force measurement device with an integrated micro displacement sensor (chip size of 3 mm by 3 mm and 0.7 mm in thickness) housed in an external trapezoidal metallic frame. Applying shearing force on the surface of the frame, the tilts occur on the ceiling of the frame. We can measure that tilts as a shearing force by micro displacement sensor and we obtained a linear signal response to applied biaxial shearing force. The range and sensitivity of the sensor depends on the material or thickness of the frame, therefore we can apply the sensor to various possible applications by changing its shape.
- リンク情報
- ID情報
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- ISSN : 2160-5033
- Web of Science ID : WOS:000366524800107