We have studied the process of production of square pillar electrode with a copper mask plate and electrical discharge machining of the tungsten material by this electrode. Planetary motion was applied to the mask plate in which a square hole was machined in advance. The square micro pillar electrode was produced through this process. In the next stage, square holes were drilled to the tungsten material by using this electrode. In order to perform simultaneous machining of a micro electrode and micro holes, a tandem structure mechanism was developed. This paper described the result of machining process with this new mechanism.