2015年12月
Frequency scanning interferometry with nanometer precision using a vertical-cavity surface-emitting laser diode under scanning speed control
OPTICAL REVIEW
- 巻
- 22
- 号
- 6
- 開始ページ
- 869
- 終了ページ
- 874
- 記述言語
- 英語
- 掲載種別
- 研究論文(学術雑誌)
- DOI
- 10.1007/s10043-015-0140-3
- 出版者・発行元
- OPTICAL SOC JAPAN
Frequency scanning interferometry technique with a nanometer precision using a vertical-cavity surface-emitting laser diode (VCSEL) is presented. Since the frequency scanning of the VCSEL is linearized by the phase-locked-loop technique, the gradient of the interference fringe order can be precisely determined using linear least squares fitting. This enables a length measurement with a precision better than a quarter wavelength, and the absolute fringe number including the integer part at the atomic transition spectrum (rubidium-D-2 line) is accurately determined. The validity of the method is demonstrated by excellent results of block gauge measurement with a root mean square error better than 5 nm.
- リンク情報
- ID情報
-
- DOI : 10.1007/s10043-015-0140-3
- ISSN : 1340-6000
- eISSN : 1349-9432
- Web of Science ID : WOS:000366827500001