Optical waveguides were fabricated by modifying the optical properties inside a LiTaO3 crystal by irradiation with femtosecond laser pulses, and the performance and optical properties of the waveguide were investigated. On the basis of near-field pattern of the light guided through the waveguides, the optimum writing conditions such as the pulse energy and the pulse duration were determined. The waveguide written inside a LiTaO3 crystal had a strong polarization dependence of guided light. Observation by a polarized microscope suggested that the stress distribution around the photoexcited region should be responsible for the polarization dependence of guided light. In addition, the second harmonic generation from a laser beam passing through the waveguide was observed, which suggests that the ferroelectric properties of LiTaO3 were preserved after the photoexcitation. (C) 2011 The Japan Society of Applied Physics