論文

査読有り
2018年1月1日

Fabrication of nitrogen-containing diamond-like carbon film by filtered arc deposition as conductive hard-coating film

Japanese Journal of Applied Physics
  • Yushi Iijima
  • Toru Harigai
  • Ryo Isono
  • Takahiro Imai
  • Yoshiyuki Suda
  • Hirofumi Takikawa
  • Masao Kamiya
  • Makoto Taki
  • Yushi Hasegawa
  • Nobuhiro Tsuji
  • Satoru Kaneko
  • Shinsuke Kunitsugu
  • Hitoe Habuchi
  • Shuji Kiyohara
  • Mikio Ito
  • Sam Yick
  • Avi Bendavid
  • Phil Martin
  • 全て表示

57
1
記述言語
英語
掲載種別
研究論文(国際会議プロシーディングス)
DOI
10.7567/JJAP.57.01AE07
出版者・発行元
Japan Society of Applied Physics

Diamond-like carbon (DLC) films, which are amorphous carbon films, have been used as hard-coating films for protecting the surface of mechanical parts. Nitrogen-containing DLC (N-DLC) films are expected as conductive hard-coating materials. N-DLC films are expected in applications such as protective films for contact pins, which are used in the electrical check process of integrated circuit chips. In this study, N-DLC films are prepared using the T-shaped filtered arc deposition (T-FAD) method, and film properties are investigated. Film hardness and film density decreased when the N content increased in the films because the number of graphite structures in the DLC film increased as the N content increased. These trends are similar to the results of a previous study. The electrical resistivity of N-DLC films changed from 0.26 to 8.8 Ω cm with a change in the nanoindentation hardness from 17 to 27 GPa. The N-DLC films fabricated by the T-FAD method showed high mechanical hardness and low electrical resistivity.

リンク情報
DOI
https://doi.org/10.7567/JJAP.57.01AE07
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000418412100031&DestApp=WOS_CPL
ID情報
  • DOI : 10.7567/JJAP.57.01AE07
  • ISSN : 1347-4065
  • ISSN : 0021-4922
  • SCOPUS ID : 85040017233
  • Web of Science ID : WOS:000418412100031

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