論文

査読有り
1999年

Sinusoidal wavelength-scanning interferometers using a superluminescent diode

INTERFEROMETRY '99: APPLICATIONS
  • O Sasaki
  • ,
  • N Murata
  • ,
  • K Akiyama
  • ,
  • T Suzuki

3745
開始ページ
196
終了ページ
204
記述言語
英語
掲載種別
研究論文(国際会議プロシーディングス)
出版者・発行元
SPIE-INT SOC OPTICAL ENGINEERING

Two different sinusoidal wavelength-scanning (SWS) interferometers with a SWS light source using a superluminescent laser diode are proposed for step-profile measurement and real-time distance measurement, respectively. An optical path difference (OPD) longer than a wavelength is measured from detection of sinusoidal phase-modulation amplitude Z(b) of the interference signal that is proportional to the OPD and the scanning width 2b. In step-profile measurement, if measurement error in the OPD obtained from Z(b) is Smaller than a half wavelength, this measured value of the OPD is combined with a fractional value of the OPD obtained from the conventional phase of the interference signal. This combination enables us to measure the OPD longer than a wavelength with a high accuracy of a few nm. In real-time distance measurement, the amplitude Z(b) is kept at a specified constant value for changes of OPD by controlling the scanning width 2b of the wavelength with a feedback system. The amplitude Z(b) is detected by processing the interference signal with electric circuits in real-time. The value of b is easily controlled in the SWS light source, and an OPD longer than a wavelength is measured from the value of b with an accuracy of about a wavelength.

リンク情報
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000082902400023&DestApp=WOS_CPL
ID情報
  • ISSN : 0277-786X
  • Web of Science ID : WOS:000082902400023

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