2005年4月
Two-grating interferometer with sinusoidal phase modulation for surface profile measurement
OPTICAL ENGINEERING
- ,
- ,
- 巻
- 44
- 号
- 4
- 開始ページ
- 043601_1
- 終了ページ
- 043601_6
- 記述言語
- 英語
- 掲載種別
- 研究論文(学術雑誌)
- DOI
- 10.1117/1.1883083
- 出版者・発行元
- SPIE-SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS
A two-grating interferometer for measurement of profiles of polished surfaces is proposed. The +/- first-order beams diffracted by the first grating produce parallel fringes of about 50-mu m spacing on an object surface. By using the second grating, we eliminate the parallel fringes and extract a phase distribution produced by the surface profile of the object. Moreover, the vibration of the second grating of a small size enables us to use the sinusoidal phase-modulating interferometry. Measurement resolution is higher than 0.3 mu m at the equivalent wavelength of 35 mu m. (c) 2005 Society of Photo-Optical Instrumentation Engineers.
- リンク情報
- ID情報
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- DOI : 10.1117/1.1883083
- ISSN : 0091-3286
- eISSN : 1560-2303
- Web of Science ID : WOS:000232590400019