2003年
Growth and characterization of boron carbon nitride films with low dielectric constant
Diamond and Related Materials
- 巻
- 12, 1117-1121
- 号
- DOI
- 10.1016/S0925-9635(02)00344-8
- ID情報
-
- DOI : 10.1016/S0925-9635(02)00344-8