2017年
Deposition of a diamond-like-carbon film by ion plating and investigation on its adhesiveness
Key Engineering Materials
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- 巻
- 749 KEM
- 号
- 開始ページ
- 70
- 終了ページ
- 75
- 記述言語
- 英語
- 掲載種別
- 研究論文(国際会議プロシーディングス)
- DOI
- 10.4028/www.scientific.net/KEM.749.70
© 2017 Trans Tech Publications, Switzerland. Diamond-like-carbon (DLC) films are promising as coating materials. Ion plating, an excellent method in terms of adhesiveness, step coverage, and deposition rate, can form not only pure metal films but also oxide films, nitride films, and carbonized films. In this study, which aimed to form a DLC film with good adhesiveness and a diamond crystal structure, a DLC film, with a SiC interlayer formed by ion plating with introduction of tetramethylsilane (TMS), was formed. It was experimentally revealed that as the interlayer thickness increases, the crystal structure in the DLC film becomes more diamond rich, and the adhesiveness of the DLC film and substrate is thereby improved.
- リンク情報
- ID情報
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- DOI : 10.4028/www.scientific.net/KEM.749.70
- ISSN : 1013-9826
- eISSN : 1662-9795
- SCOPUS ID : 85028702482