論文

2013年

Structural Properties of SrTiO3 Transparent Thin Films Formed by RF Magnetron Sputtering with Changing Substrate Temperatures

ADVANCED MICRO-DEVICE ENGINEERING III
  • Kenji Kakiage
  • ,
  • Shiho Ishiuchi
  • ,
  • Toru Kyomen
  • ,
  • Minoru Hanaya

534
開始ページ
40
終了ページ
+
記述言語
英語
掲載種別
研究論文(国際会議プロシーディングス)
DOI
10.4028/www.scientific.net/KEM.534.40
出版者・発行元
TRANS TECH PUBLICATIONS LTD

Transparent thin films of strontium titanate (SrTiO3) were formed on the substrate of quartz glass plate by RF magnetron sputtering with changing the substrate temperatures during the sputtering from 100 to 700 degrees C. The particle size and the lattice constant of the cubic-SrTiO3 crystallites composing the film were exhibited to be changed from 13 to 48 nm and from 4.02 to 3.96 angstrom, respectively, by the change of the substrate temperatures from 400 to 700 degrees C. The UV absorption edges of the transparent film samples shifted to longer wavelength with the increase of the particle size and the decrease of the lattice constant of the nano-crystalline SrTiO3.

リンク情報
DOI
https://doi.org/10.4028/www.scientific.net/KEM.534.40
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000316642000009&DestApp=WOS_CPL
ID情報
  • DOI : 10.4028/www.scientific.net/KEM.534.40
  • ISSN : 1013-9826
  • Web of Science ID : WOS:000316642000009

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