2006年11月
A hybrid sensor for the measurement of a wide range of longitudinal surface displacement based on laser reflection and scattering
MEASUREMENT SCIENCE AND TECHNOLOGY
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- 巻
- 17
- 号
- 11
- 開始ページ
- 2913
- 終了ページ
- 2919
- 記述言語
- 英語
- 掲載種別
- 研究論文(学術雑誌)
- DOI
- 10.1088/0957-0233/17/11/008
- 出版者・発行元
- IOP PUBLISHING LTD
A hybrid sensor for measuring longitudinal surface displacement including surface undulation and surface roughness over a wide range from nm to a few hundred mu m has been developed. Two main sensors are incorporated in a single body, i.e., it is a hybrid system, with one sensor based on laser reflection for nm-scale measurement, while the other is based on imaging the irradiated portion for mu m-scale measurement. A preliminary experiment using this hybrid sensor showed that the sensor for measuring surface undulation has a longitudinal resolution of 1 nm and a measurement frequency of 24 Hz, and that the sensor for measuring surface roughness has a longitudinal resolution of 2 mu m, a measurement range of +/- 300 mu m and a measurement frequency of a few hundred Hz. This hybrid sensor is relatively compact and its cost/performance ratio allows its practical use.
- リンク情報
- ID情報
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- DOI : 10.1088/0957-0233/17/11/008
- ISSN : 0957-0233
- eISSN : 1361-6501
- CiNii Articles ID : 30017877832
- Web of Science ID : WOS:000241991300009