1996年
Development and Performance of a Profilometer for Measurment of Mirror Surface Figure
Journal of Electron Spectroscopy and Related Phenomena
- 巻
- 80, 485-488
- 号
- DOI
- 10.1016/0368-2048(96)03022-8
- ID情報
-
- DOI : 10.1016/0368-2048(96)03022-8