Apr, 2006
Experimental study of effective carrier mobility of multi-fin-type double-gate metal-oxide-semiconductor field-effect transistors with (111) channel surface fabricated by orientation-dependent wet etching
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS
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- Volume
- 45
- Number
- 4B
- First page
- 3084
- Last page
- 3087
- Language
- English
- Publishing type
- DOI
- 10.1143/JJAP.45.3084
- Publisher
- INST PURE APPLIED PHYSICS
We present an experimental study of effective carrier mobility (mu(eff)) of multi-fin-type double-gate metal-oxide-semiconductor field-effect transistors (FinFETs) with a (111) channel surface fabricated by orientation-dependent Wet etching. The peak values of the obtained mu(eff) of electrons and holes are approximately 300 and 160 cm(2)/(V s), respectively, which are close to those in (111) bulk metal-oxide-semiconductor field-effect transistors (MOSFETs). Moreover, the effective electric field (E-eff) dependence of the mu(eff) of electrons and holes shows a good agreement with the mobility universal curves of (111) bulk MOSFETs. These results indicate that the quality and channel surface roughness of Si-fins by orientation-dependent wet etching are excellent. The obtained results of mu(eff) are very useful for the modeling and design of FinFET-complementary metal-oxide-semiconductor (CMOS) circuits and the developed wet etching technique is very attractive in the fabrication of ultrathin and high-quality Si-fin channels.
- Link information
- ID information
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- DOI : 10.1143/JJAP.45.3084
- ISSN : 0021-4922
- CiNii Articles ID : 150000046852
- Web of Science ID : WOS:000237570600039