The present study proposed a method to evaluate the equibiaxial compressive residual stress of a metal surface by means of a depth-sensing indentation method using a spherical indenter. Inverse analysis using the elastic-plastic finite-element model for an indentation test was established to evaluate residual stress from the indentation load-depth curve. The proposed inverse analysis utilizes two indentation test results for a reference specimen whose residual stress is already known and for a target specimen whose residual stress is unknown, in order to exclude the effect of other unknown mechanical properties, such as Young's modulus and yield stress. Residual stress estimated by using the indentation method is almost identical to that measured by X-ray diffraction for indentation loads of 0.49-0.98 N. Therefore, it can be concluded that the proposed method Can effectively evaluate residual stress on metal surface. (C) 2011 Elsevier Ltd. All rights reserved.