Papers

Peer-reviewed Lead author

2015

Periodical structure of vortices in a semiconductor single wafer spin cleaner

Transactions of the JSME (in Japanese)

Toshinori KOUCHI
Naoya FUKUDA
Yusuke NAKANO
Yoshiya SHIMIZU
Yasunori NAGATA
Shinichiro YANASE

Volume: 81
Number: 829
First page: 15
Last page: 00273
Language: Japanese
Publishing type
DOI: 10.1299/transjsme.15-00273
Publisher: Japan Society of Mechanical Engineers

Link information

DOI: https://doi.org/10.1299/transjsme.15-00273
J-GLOBAL: https://jglobal.jst.go.jp/en/detail?JGLOBAL_ID=201502207353879352
URL: https://www.jstage.jst.go.jp/article/transjsme/81/829/81_15-00273/_pdf

ID information

DOI : 10.1299/transjsme.15-00273
ISSN : 2187-9761
eISSN : 2187-9761
J-Global ID : 201502207353879352

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