1999年
Control of grain size of Pb(Zr,Ti)O-3 thin films by MOCVD and the effect of size on the electrical properties
FERROELECTRIC THIN FILMS VII
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- 巻
- 541
- 号
- 開始ページ
- 327
- 終了ページ
- 332
- 記述言語
- 英語
- 掲載種別
- 出版者・発行元
- MATERIALS RESEARCH SOCIETY
The grain size of MOCVD-Pb(Zr,Ti)O-3(PZT) thin films was successfully controlled by changing the grain size of Ir bottom electrodes and by changing the growth rate of PZT films. In Zr/PZT/Ir/SiO2/Si capacitors, the grain size of PZT thin films increased from 120 to 240nm as the grain size of bottom Ir electrodes increased from 50 to 200nm. The dielectric constants of PZT thin films increased from 760 to 1440 as the grain size increased from 120 to 240nm. Remanent polarization increased and coercive field decreased as the grain size increased. This dependence of electrical properties on the grain size coincided with that of ceramics.
- リンク情報
- ID情報
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- ISSN : 0272-9172
- SCOPUS ID : 0032592319
- Web of Science ID : WOS:000081716100048