2003年5月
Deposition of diamond-like carbon films on inner wall of sub-millimeter diameter steel tube by plasma source ion implantation
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
- ,
- 巻
- 206
- 号
- 開始ページ
- 704
- 終了ページ
- 707
- 記述言語
- 英語
- 掲載種別
- DOI
- 10.1016/S0168-583X(03)00838-3
- 出版者・発行元
- ELSEVIER SCIENCE BV
Diamond-like carbon (DLC) films were deposited on the inner wall surface of 304 austenitic type stainless steel tubes with inner diameter of 0.9 and 0.5 and 15 mm length by a plasma source ion implantation (PSII). A 2.45 GHz microwave was fed into a tubular vacuum chamber and supplied to an antenna. An acetylene gas was fed into the alumina ceramic tube. Plasma was produced by a coaxial electron cyclotron resonance (ECR) discharge. A magnetic field of one kilogauss was generated by a solenoidal coil. The negative high voltage pulse (typically -10 kV, 1 kHz, 10 mus) was applied to the steel tube. The results showed that the DLC film deposition on the inner wall of sub-millimeter size steel tubes was achieved by the PSII Raman spectra of the DLC films showed a broad peak related to amorphous carbon structure. (C) 2003 Elsevier Science B.V. All rights reserved.
- リンク情報
- ID情報
-
- DOI : 10.1016/S0168-583X(03)00838-3
- ISSN : 0168-583X
- Web of Science ID : WOS:000183690500152