Papers

Mar 20, 1995

Negative-Ion Production of Gas Material in RF-Plasma Sputter-Type Heavy Negative-Ion Source

Journal of the Vacuum Society of Japan

TSUJI Hiroshi
OKAYAMA Yoshio
TOYOTA Yoshitaka
GOTOH Yasuhito
ISHIKAWA Junzo

Volume: 38
Number: 3
First page: 218
Last page: 220
Language: Japanese
Publishing type
DOI: 10.3131/jvsj.38.218
Publisher: The Vacuum Society of Japan

Link information

DOI: https://doi.org/10.3131/jvsj.38.218
CiNii Articles: http://ci.nii.ac.jp/naid/10001698536
CiNii Books: http://ci.nii.ac.jp/ncid/AN00119871
URL: http://id.ndl.go.jp/bib/3612169
URL: https://jlc.jst.go.jp/DN/JALC/00032679656?from=CiNii

ID information

DOI : 10.3131/jvsj.38.218
ISSN : 0559-8516
CiNii Articles ID : 10001698536
CiNii Books ID : AN00119871

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