1998年1月
Alternate layer deposition method for the deposition of c-axis oriented hexagonal barium ferrite thin films
JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS
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- 巻
- 177
- 号
- Pt.1
- 開始ページ
- 241
- 終了ページ
- 242
- 記述言語
- 英語
- 掲載種別
- DOI
- 10.1016/S0304-8853(97)00981-5
- 出版者・発行元
- ELSEVIER SCIENCE BV
Sputter-deposition of c-axis perpendicularly oriented hexagonal barium ferrite (BaM: BaFe12O19, and BaW: BaFe18O27) thin films was attempted by means of an alternate periodic deposition of Fe3O4 layer (S-layer) and BaFe6O11 layer (R-layer). BaM film with c-axis orientation was obtained at temperatures above 540 degrees C, in which control of the thickness of both S-layer and R-layer was very important to obtain a BaM thin film with c-axis orientation. BaW film, however, was not obtained at the periodic layer deposition condition corresponding to the BaW crystal (S-layer = 9.3 Angstrom, R-layer = 6.9 Angstrom). (C) 1998 Elsevier Science B.V. All rights reserved.
- リンク情報
- ID情報
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- DOI : 10.1016/S0304-8853(97)00981-5
- ISSN : 0304-8853
- Web of Science ID : WOS:000072262000101