受賞

2021年10月

Best Presentation Award

7th International Workshop on Low Temperature Bonding for 3D Integration
  • J. Liang, D. Takatsuki, Y. Shimizu, M. Higashiwaki, Y. Ohno, Y. Nagai, N. Shigekawa

タイトル
Fabrication of Ga2O3/Si direct bonding interface for high power device applications