論文

査読有り
2015年12月

Stacked Image Sensor Using Chlorine-doped Crystalline Selenium Photoconversion Layer Composed of Size-controlled Polycrystalline Particles

IEE IEDM
  • S. Imura
  • ,
  • K. Kikuchi
  • ,
  • K. Miyakawa
  • ,
  • H. Ohtake
  • ,
  • M. Kubota
  • ,
  • T. Okino
  • ,
  • Y. Hirose
  • ,
  • Y. Kato
  • ,
  • N. Teranishi

4
3
開始ページ
88
終了ページ
91
記述言語
英語
掲載種別
研究論文(国際会議プロシーディングス)
出版者・発行元
IEEE

We demonstrate a stacked complementary metal-oxide semiconductor (CMOS) image sensor overlaid with a chlorine (Cl)-doped crystalline selenium (c-Se) photoconversion layer. The size of the polycrystalline particles (grains) of c-Se, which is strongly related to dark current pattern noise, is controlled by Cl doping to c-Se; hence, the resulting device provides clear images. Furthermore, avalanche multiplication was successfully observed in a Cl-doped c-Se film fabricated on a glass substrate at a relatively low applied voltage.

リンク情報
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000380472500198&DestApp=WOS_CPL
ID情報
  • Web of Science ID : WOS:000380472500198

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