Mar, 2022
Performance improvement of micro-ultrasonic motors using the thickness shear mode piezoelectric elements
Sensors and Actuators A: Physical
- ,
- Volume
- 335
- Number
- First page
- 113347
- Last page
- 113347
- Language
- English
- Publishing type
- Research paper (scientific journal)
- DOI
- 10.1016/j.sna.2021.113347
- Publisher
- Elsevier BV
- Link information
- ID information
-
- DOI : 10.1016/j.sna.2021.113347
- ISSN : 0924-4247