2005年7月1日
MEMS材料の信頼性評価
電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society
- 巻
- 125
- 号
- 7
- 開始ページ
- 289
- 終了ページ
- 293
- 記述言語
- 日本語
- 掲載種別
- DOI
- 10.1541/ieejsmas.125.289
- 出版者・発行元
- The Institute of Electrical Engineers of Japan
This review describes the testing,analyzing,and evaluating methods for the mechanical reliability of MEMS materials,which has much more importance on the commercialization of MEMS devices that has tiny mechanical structures. The reliability of silicon,the most often used materials as structure in MEMS,is also summarized.
- リンク情報
- ID情報
-
- DOI : 10.1541/ieejsmas.125.289
- ISSN : 1341-8939
- CiNii Articles ID : 10016466186
- CiNii Books ID : AN1052634X