2016年2月
Time-Resolved Micro-Raman Stress Spectroscopy for Single-Crystal Silicon Resonators Using a MEMS Optical Chopper
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
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- 巻
- 25
- 号
- 1
- 開始ページ
- 188
- 終了ページ
- 196
- 記述言語
- 英語
- 掲載種別
- 研究論文(学術雑誌)
- DOI
- 10.1109/JMEMS.2015.2503723
- 出版者・発行元
- IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
A microelectromechanical systems (MEMS) optical chopper with a silicon-on-glass structure has been developed for time-resolved micro-Raman stress measurements of single-crystal silicon resonators. The chopper was inserted directly into the optics of a commercial micro-Raman spectrometer to modulate the incident laser light. The slit portion of the chopper (empty set 500 mu m) was actuated by electrostatic force using slanted parallel plate capacitors. The chopper was fabricated in a 15-mu m-thick silicon layer on a 600-mu m-thick glass substrate on which aluminum shutters were formed. The stopper structure and pull-in driving realized low-voltage operation at 12 V and a quick mechanical response time of 77 mu s. The modulation of incident light for measuring an out-of-plane silicon resonator made from a silicon-on-insulator wafer resonated at 1 kHz, and a 10% duty cycle and an extinction ratio of 31 were achieved. The dynamic stress was measured and its amplitude (303 MPa) was found to be in good agreement with the results of finite-element analysis. [2015-0159]
- リンク情報
- ID情報
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- DOI : 10.1109/JMEMS.2015.2503723
- ISSN : 1057-7157
- eISSN : 1941-0158
- Web of Science ID : WOS:000370763900020