2012年6月
Improved Designs for an Electrothermal In-Plane Microactuator
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
- 巻
- 21
- 号
- 3
- 開始ページ
- 586
- 終了ページ
- 595
- 記述言語
- 英語
- 掲載種別
- 研究論文(学術雑誌)
- DOI
- 10.1109/JMEMS.2012.2185820
- 出版者・発行元
- IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Reported presently are two design approaches to improve the performance of an electrothermal in-plane microactuator with "chevron" beams. One incorporates beams with uniform cross sections but nonuniform lengths or tilt angles to accommodate the thermally induced expansion of the "shuttle"; the other incorporates beams with nonuniform cross sections to widen the high-temperature "expansion" zones. It is derived analytically, verified using finite-element simulations, and tested by microfabricating actuators occupying a constrained device area that the incorporation of one or the other proposed features leads to an improved performance figure-of-merit, defined to be the product of the actuation displacement and force. An increase in the figure-of-merit by up to 65% per beam has been measured. [2011-0186]
- リンク情報
- ID情報
-
- DOI : 10.1109/JMEMS.2012.2185820
- ISSN : 1057-7157
- Web of Science ID : WOS:000304904400012