2008年5月
Mechanical calibration of MEMS springs with sub-micro-Newton force resolution
SENSORS AND ACTUATORS A-PHYSICAL
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- 巻
- 143
- 号
- 1
- 開始ページ
- 136
- 終了ページ
- 142
- 記述言語
- 英語
- 掲載種別
- 研究論文(学術雑誌)
- DOI
- 10.1016/j.sna.2007.10.042
- 出版者・発行元
- ELSEVIER SCIENCE SA
Direct stiffness calibration of microelectromechanical-system (MEMS) springs made of single-crystal silicon was performed using a previously developed mechanical force measurement tool. The spring devices used for calibration were fabricated from silicon-on-insulator wafers and contained one or four folded-beam springs. The spring constants were directly measured using an electromagnetic force-feedback balance with a force resolution of about 0.2 mu N. The average measured spring constant of a folded-beam spring with a designed constant of 0.7 N/m was 0.58 N/m. This successful calibration shows that this tool can be used to calibrate various kinds of MEMS flexible structures. (C) 2007 Elsevier B.V. All rights reserved.
- リンク情報
- ID情報
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- DOI : 10.1016/j.sna.2007.10.042
- ISSN : 0924-4247
- Web of Science ID : WOS:000255453300020